Optical properties of pyrolytic Silicon Nitride SiNx enriched with silicon

Pattern Photoresist Silicon Silicon Nitride Silicon Photoresist Silicon Nitride Silicon Etch Nitride Remove Photoresist

In this proposal we seek to establish a porous silicon based etching process in the WTC microfabrication laboratory. The new process will allow us to etch high aspect ratio holes through a wafer. Holes like these are important for decreasing the dead volume of connections between micro and macro systems and for increasing the complexity of micro-fluidic systems. At the present time, the minimum...

Interpolating the optical properties of varied composition silicon nitride

We develop a method for interpolating the optical properties of silicon nitride formed with different deposition parameters. Published refractive index measurements for eight silicon nitride films formed by in-line microwave plasma-enhanced chemical-vapour deposition with a range of ammonia to silane gas-flow ratios are modelled and interpolated. The measurements are fitted by a physical model ...

Optical properties of V-groove silicon nitride trench waveguides.

We numerically investigate the mode properties of the V-groove silicon nitride trench waveguides based on the experimental results. The trench waveguides are suitable for nonlinear applications. By manipulating the waveguide thicknesses, the waveguides can achieve zero dispersion or a maximized nonlinear parameter of 0.219  W-1·m-1 at 1550 nm. Broadband four-wave mixing wi...

Optical Properties of Silicon-Rich Silicon Nitride (SixNyHz) from First Principles

The real and imaginary parts of the complex refractive index of SixNyHz have been calculated from first principles. Optical spectra for reflectivity, absorption coefficient, energy-loss function (ELF), and refractive index were obtained. The results for Si3N4 are in agreement with the available theoretical and experimental results. To understand the electron energy loss mechanism in Si-rich sil...

Silicon Nitride and Silicon Carbide